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University of Utah Microfabrication Lab - Becoming A User

Access

The following steps must be followed to obtain access to the microfab:

Campus User

Off-Campus User

Statement of a Respectful Workplace

The Nanofab Lab is committed to providing an environment that is conducive to high-quality research and learning. As such, we expect a commitment from all members of the community (students, staff, faculty, and industrial visitors) to act in a manner based on courtesy, civility, mutual trust and respect. All members of the community should be aware of the potential impact of their interactions, and strive to conduct themselves at the most professional level.

To promote a better, cleaner, and safer atmosphere in the lab, we ask all community members to:

If you observe someone failing to follow these guidelines, please help them in a kind manner to understand the correct lab policy. Report continued misuse of the lab to a member of the lab staff.

Training

Laboratory staff provides all training on all equipment. Observing an authorized person does NOT constitute training. Only laboratory staff can authorize users on equipment. Equipment training sessions are to be held once per month. If a user absolutely cannot attend a training session during scheduled time, the user may arrange with the laboratory staff for a special session (at the technical staff rate).

Prior to any training session, it is preferred that the prospective user should have taken a formal course such as Fundamentals of Microfabrication Processing, or Semiconductor Devices (ECE/MSE 5201). In the absence of such training, it is incumbent upon the user to become thoroughly familiar with SOP’s (found on-line), and with the basic operating principles of the tool. Resources are available in the nanofab, as well as in the library.

Training typically consists of two sessions, a basic-training session and a follow-up session. The basic training session is taught first by laboratory staff. Safety precautions and proper equipment operations are described and demonstrated. Users should feel free to ask any questions during this session. The second session is the follow-up session where the user demonstrates the ability to operate the equipment competently with the user’s own substrates. Laboratory staff will provide minimal assistance to ensure the safe and proper operation of the equipment. The laboratory staff may quiz laboratory users. The follow-up session must be completed within one month of the basic-training session or the user will have to repeat the basic training session.

If the user can demonstrate the knowledge and ability to operate the equipment, the user will become an authorized user and be added to the user list for that equipment. If the user fails to demonstrate the knowledge and ability to operate the equipment, the user and the laboratory staff member will discuss the problems encountered and schedule a second follow-up session. If the user fails a second time, the user must attend another basic training session.

Some metrology tools, do not have scheduled training sessions. Contact the laboratory staff for training.

Users are encouraged to train only on equipment the user is certain to operate. All lab users are required to card swipe into the lab and will be billed at the basic lab entry rate for basic-training purposes. Users must reserve equipment for the follow-up training session and will be billed at the equipment rate. If a user does not use a piece of equipment for more than 1 year, they can loose authorization on that equipment, and will be required to complete the training on the equipment again. If a lab user does not enter the facility for 1 year, they may also be required to complete the lab safety test again.

Forms

Indemnification Form
Microfab User Policy
Microfab User Manual
Student Contract
Chemical Request
Microfab Work Request (On-Campus)
Microfab Work Request (Off-Campus)

Weekly Cleaning Schedule

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