University of Utah Microfabrication Lab Affiliations

Affiliated Recharge Centers are being linked through our website to enable users to search a common database for specific instrument capabilities.

1. Utah Microfabrication Core Laboratories
   • Multi-purpose cleanroom facility
   • 5300 ft of laboratory floor space
   • Thin Film Deposition- PVD and CVD systems
   • Photolithography- Layout, Pattern Generation, Aligners, Processing
   • Etching- Wet etching chemistry, Reactive Ion Etchers (Dry)
   • Test - I/V, C-V, device parameter analyzer
   • Furnaces- annealing, B & P doping, wet and dry oxidation
   • Packaging- dicing saws, wire bonders, etc.
   • Technology Library- baseline processes for CMOS transistors, solar cells, etc.
   • Laser micromachining:NdYAG (1-64nm); KrF excimer (248nm)
   • Imaging XPS / Auger / ISS- Coming Soon
2. Advanced Manufacturing Laboratory
   • CNC Manufacturing
   • Hermle C30- 5-axis high speed machining center
3. MSE Materials Characterization Facility
   • Hitachi S-3000 LV-SEM / EDS / EBSE- tungsten filament general purpose SEM
   • JEOL JEM-2000 FX II Electron Microscope
   • Philips X'Pert XRD
4. Physics Facilities and Services
   • OptoElectronics Lab
   • Scanning Electron Microscopy- configured for e-beam lithography
5. Geology & Geophysics
   • Electron Microprobe
   • X-Ray Diffraction
6. Nano Imaging Facility (Coming Soon)
   • Imaging XPS / Auger / ISS
   • Characterization/Inspection- Atomic Force & Optical Microscopes, Stylus Profilometers
7. Health Science Center Core Research Facilities
   • Cell Imaging / Fluorescence Microscopy
   • Electron Microscopy- Hitachi 2460N W-filament Scanning Electron Microscope (no EDX) with lo-vac capability and robinson BSE detection.
   • NMR
   • Computer Tomography

Affiliated Labs are facilities operated by individual PI's who have a desire to make their capabilities available to others, with the consideration of on-going research. Fees are charged to offset the costs of operation, maintenance, and upgrading. For additional information or to schedule time on the equipment contact Monica Heaton. We will work with the faculty to determine availability.

1. Microtomography Lab: MicroCT, a Microsystem characterization instrument developed in the Metallurgy department utilizing highly focused X-rays to provide 3-D internal rendering of MicroSystems at resolution of 5-20 microns.
   Dr. Jan D. Miller, Metallurgical Engineering
2. MVS Systems PECVD for deposition of amorphous Si, or SiGe alloys.
   Dr. Craig Taylor, Physics Department
3. Mechanical Behavior Laboratory
   • MTS Materials Test System with Laser Interferometer
   • MTS System with Teststar Digital Controller
   • Instron High Temperature Materials Test System
   
   Dr. Ravi Chandran, Metallurgical Engineering
4. Organometallic vapor phase epitaxial (OMVPE)
   Dr. Gerald Stringfellow, Material Science & Engineering
5. Femtosecond Laser Systems
   Dr. Steve Blair, Electrical & Computer Engineering & Dr. Val Vardeny, Physics Department
6. Utah State Center for Excellence for Biomedical Microfluidics
   Dr. Bruce Gale, Mechanical Engineering
7. Microsystems Lab
   Florian Solzbacher, Electrical & Computer Engineering
8. Analytical Laser Spectroscopy Laboratory
   This campus-wide research facility sponsors collaborative activities among the Department of Chemistry, the College of Engineering, and the School of Medicine. The laboratory is equipped with an inventory of about $1 million in laser instrumentation with capability for ultratrace level, optically-based detection and sensing, and spectroscopic studies of interfacial phenomena.
9. Petroleum Research Center (PERC)- Laboratory for measuerment of PVT properties of complex oil mixtures
   • GC-FID, HT-GC and GC-MS chromatography/spectrometry
   • FT-IR and UV-Vis spectrometry
   • Asphaltenes and compound class (SARA) analysis
   • True boiling point and vacuum distillation measurement
   • Thermal analysis by DSC and TGA
   • High-pressure and ambient NIR spectroscopy vs. temperature
   • Ultimate analysis for C, H, N, S, and O
   • Measurement of oil bulk properties, density, viscosity, pour-point, molecular weight (VPO)
10. Chemical Engineering Analytical Teaching Laboratory
    • Physical property measurements- hydrometer, pyrometer, digital density meter, and thermal gravimetric analysis
    • Chromatography
    • Spectrometry

1. Sandia Summit (TM) design and visualization tools for surface micromachining (University Alliance). Also, 50 educational licenses for ANSYS 6.0 to perform computer modeling and simulation. Intellisuite modeling software by Intellisense. Fluent for microfluidics simulation.
2. CADE lab: SUN Solaris machines to run Finite element analysis (FEA). Also available: Intellisuite MEMS design and modeling software, and CADENCE layout software, Pro/ENGINEER.
3. Access to Utah High Performance Computing Center (UHPC) where extensive high speed computational hardware as well as several materials simulation software packages are available.

Off Campus Resources

1. BYU Department of Chemistry and Biochemistry
   Time of Flight Secondary Ion Mass Spectrometry
2. BYU EM Lab
3. Sandia National Labs
4. Los Alamos National Labs